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Finite Element Modeling of a Micro-Scale Resonant Fan for Microfluidic Transport

Published by the American Society of Agricultural and Biological Engineers, St. Joseph, Michigan www.asabe.org

Citation:  Paper number  033098,  2003 ASAE Annual Meeting . (doi: 10.13031/2013.15007) @2003
Authors:   Matthew W. Eckerle, Chell E. Nyquist, Robert L. Schlipf, Kamyar Haghighi, Steven T. Wereley
Keywords:   Finite element, modeling, MEMS, microfluidics

Finite element methods to model the behavior of a micro-scale resonant fan for fluidic transport are presented. First natural resonant frequency data from modal analysis are compared with experimental data. Electrostatic and displacement-dependant static models approximate a static fan tip displacement of 0.96 m. Harmonic displacement-dependent analyses are compared with resonant tip displacement data from a similar fan to approximate the damping coefficient of the fan at 0.4. This damping coefficient is applied to the original fan to approximate a resonant tip deflection of 4.90 m.

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